Download A User's Guide to Ellipsometry by Harland G. Tompkins PDF

By Harland G. Tompkins

This textual content on optics for graduate scholars explains tips on how to ensure fabric houses and parameters for inaccessible substrates and unknown movies in addition to the best way to degree super skinny motion pictures. Its 14 case reviews illustrate ideas and toughen purposes of ellipsometry — relatively on the subject of the semiconductor and to stories concerning corrosion and oxide growth.
A User's advisor to Ellipsometry will let readers to maneuver past restricted turn-key functions of ellipsometers. as well as its accomplished discussions of the size of movie thickness and optical constants in movie, it additionally considers the trajectories of the ellipsometric parameters Del and Psi and the way alterations in fabrics have an effect on parameters. This quantity additionally addresses using polysilicon, a cloth more often than not hired within the microelectronics undefined, and the results of substrate roughness. 3 appendices supply precious references.

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Extra resources for A User's Guide to Ellipsometry

Example text

Optical Constants for Several Metals, along with Corresponding Δ°, Ψ0, and Depth to 1/e. 5 μ n & k values from Amer. Inst, o f Phys. Handbook, D. E. 65 on several metals. For illustration purposes, we have taken the index for the Trajectories for Absorbing Films 45 various substrates from a handbook and they are listed in Table 3-1. We emphasize that this is for illustrative purposes only; in actual practice, one should measure these for the particular samples of interest. Whereas silicon dioxide on silicon uses most of the Del/Psi domain, an organic layer on aluminum or gold is rather crowded in the center.

As we progress from no film to a very thin film to a thicker film, the Del/Psi trajectory will move from the value characteristic of the substrate to the value characteristic of bulk film material. We show this graphically in Figure 3-10. In this case, we are depositing a film of tungsten onto 210 Bulk Silicon 180 -

Figure 2-11 shows one example of a rotating null instrument. 2 The Photometric Instrument The second type of rotating element instrument is a photometric instrument (it uses the values of the light intensity). This instrument is shown schematically in Figure 2-12. In this case, the polarizer is set at a Instrumentation 32 Photomultiplier C v> Rotating Analyzer Figure 2-12. A second type of rotating element instrument. In this type, only the analyzer rotates. The intensity measurement can be made with the QWP either in the beam or out of the beam.

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