Download Analysis and Design Principles of MEMS Devices by Minhang Bao PDF

By Minhang Bao

Sensors and actuators at the moment are a part of our way of life and seem in lots of home equipment, corresponding to autos, merchandising machines and washing machines. MEMS (Micro Electro Mechanical structures) are micro structures which includes micro mechanical sensors, actuators and micro digital circuits. a number of MEMS units were constructed and lots of mass produced, however the info on those is greatly dispersed within the literature. This publication provides the research and layout rules of MEMS units. the knowledge is finished, concentrating on microdynamics, similar to the mechanics of beam and diaphragm buildings, air damping and its impact at the movement of mechanical constructions. utilizing sensible examples, the writer examines difficulties linked to research and layout, and strategies are integrated in the back of the publication. the fitting complicated point textbook for graduates, Analysis and layout ideas of MEMS Devices is an appropriate resource of reference for researchers and engineers within the box.

* provides the research and layout rules of MEMS units extra systematically than ever before.

* comprises the theories crucial for the research and layout of MEMS comprises the dynamics of micro mechanical structures

* an issue part is integrated on the finish of every bankruptcy with solutions supplied on the finish of the booklet.

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Christel, F. S. Smith, Piezoresistance in germanium and silicon, Physics Review, Vol. 94 (1954)42-49 [5] O. N. W. Chapman, D. Long, Silicon diffused-element piezoresistive diaphragms, Journal of Applied Physics, Vol. 33 (1962) 3322-3327 [6] A. C. M. J. Somers, Miniature pressure transducers with a silicon diaphragm, Philips Tech. , Vol. l (1973) 14-20 [7] Samaun, K. D. Wise, J. B. Angell, An IC piezoresistive pressure sensor for biomedical instrumentation, IEEE Trans, on Biomedical Engineering, Vol.

If the element is subjected to the action of normal stresses Txx, TYY and Tzz, the resultant strain components is obtained from Eqs. ^lTzz-viT^+TyyWE In Eq. 13), the relations between normal strain components and normal stress components are completely defined by two material-related constants: Young's modules, E, and Poisson ratio, v. 14) 2G or E xy =ZkL>e s~i ' Lr =Zk,e yz s-~t ~ & =Zk. 15) x J U where G is called the Shear modulus. Eqs. 15) indicate that a shearing strain component depends only on the corresponding shearing stress component.

Sniegowski, O LaVigne, P. McWhorter, Friction in surface micromachined microengines, Proc. SPIE, Vol. 2722, Smart Electronics and MEMS, San Diego, Feb. 28-29, 1996, 197-204 [29] Kuehnel, S. Sherman, A surface micromachined silicon accelerometer with onchip detection circuitry, Sensors and Actuators A 45 (1994) 7-16 [30] J. B. Sampsell, The digital micro mirror device and its application to project displays, Digest of Technical Papers, The 7th International Conference on Solid-State Sensors and Actuators, Yokohama, Japan, June 7-10, 1993 (Transducers'93) 24-27 Chapter 2 Mechanics of Beam and Diaphragm Structures Crystalline silicon is an excellent mechanical material as well as an excellent electronic material.

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